Investigation on femtosecond laser combined with dynamic wet etching machining of SiC/SiC
Xiaoqi Li, Songmei Yuan, Ning Zhou, Jiayong Wei, Mengxuan Gao, Tianrui Hu, Xiaojin Shi
Topics & Concepts
Materials scienceSilicon carbideEtching (microfabrication)FemtosecondComposite materialIsotropic etchingLaserCorrosionMachiningCarbideLayer (electronics)MetallurgyOpticsPhysicsAdvanced Surface Polishing TechniquesLaser Material Processing TechniquesDiamond and Carbon-based Materials Research