The effect of O2 plasma post-treatment on atomic layer deposited TiO2 thin films
Byunguk Kim, Taeseong Kang, Seokhwi Song, Chanwon Jung, Jung‐Ho Lee, Seonghak Cheon, Hyeongtag Jeon
Topics & Concepts
AnataseThin filmMaterials scienceX-ray photoelectron spectroscopyCrystallinityPlasmaAnalytical Chemistry (journal)DielectricNanotechnologyChemistryComposite materialChemical engineeringPhotocatalysisOptoelectronicsChromatographyEngineeringBiochemistryCatalysisQuantum mechanicsPhysicsSemiconductor materials and devicesZnO doping and propertiesMetal and Thin Film Mechanics