Litcius/Paper detail

Production of piezoelectric cantilever using MEMS-based layered manufacturing technology

Osman Ülkir, İshak Ertugrul, Nihat Akkus, Salih Özer

2022Optik19 citationsDOIOpen Access PDF

Topics & Concepts

CantileverPiezoelectricityBimorphMaterials scienceMultiphysicsMicroelectromechanical systemsDisplacement (psychology)StereolithographyMicrofabricationAcousticsFabricationOpticsFinite element methodOptoelectronicsStructural engineeringComposite materialPhysicsEngineeringPsychologyMedicinePathologyAlternative medicinePsychotherapistAdvanced MEMS and NEMS TechnologiesAdvanced Sensor and Energy Harvesting MaterialsAdditive Manufacturing and 3D Printing Technologies