Competitive adsorption between bromide ions and bis(3-sulfopropyl)-disulfide for Cu microvia filling
Myung Hyun Lee, Myung Jun Kim, Jae Jeong Kim
Topics & Concepts
BromideAdsorptionHalideElectrochemistryIonInorganic chemistryElectrolyteChemistryMaterials scienceChemical engineeringElectrodeOrganic chemistryPhysical chemistryEngineeringElectrodeposition and Electroless CoatingsCopper Interconnects and ReliabilityNanoporous metals and alloys