An integrated capacitive sensing method for electrostatic comb-drive micromirrors
Ruihao Zhang, Jiasheng Qu, Yingchao Cao, Xinchao Zhang, Yilong Jia, Xiaoyi Wang, Wenbiao Zhou, Huikai Xie
Topics & Concepts
Capacitive sensingSIGNAL (programming language)Comb driveMaterials scienceDigital micromirror deviceOpticsMicroelectromechanical systemsVoltagePhase (matter)Distortion (music)FeedthroughOptoelectronicsPhysicsCMOSComputer scienceElectrical engineeringEngineeringPathologyProgramming languageAlternative medicineFabricationMedicineAmplifierQuantum mechanicsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAdvanced Fiber Optic Sensors