Chemical mechanical polishing of sapphire elucidated by densely discrete phase model and verified using atomic force microscopy
Mufang Zhou, Min Zhong, Wenhu Xu, Meirong Yi, Xiaobing Li, Jianfeng Chen
Topics & Concepts
Atomic force microscopyChemical-mechanical planarizationSapphirePolishingMaterials scienceNanotechnologyComposite materialOpticsPhysicsLaserAdvanced Surface Polishing TechniquesIon-surface interactions and analysisForce Microscopy Techniques and Applications