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Step flow growth of β-Ga2O3 films on off-axis 4H-SiC substrates by LPCVD

Jichao Hu, Bei Xu, Zihan Zhang, Xiaomin He, Lianbi Li, Hongjuan Cheng, Jian Wang, Jiaqi Meng, Xi Wang, Chao Zhang, Renxu Jia, Hongbin Pu

2023Surfaces and Interfaces17 citationsDOI

Topics & Concepts

Materials scienceChemical vapor depositionRaman spectroscopyX-ray photoelectron spectroscopyHeterojunctionBand gapOptoelectronicsThin filmAnalytical Chemistry (journal)Chemical engineeringOpticsNanotechnologyChemistryPhysicsChromatographyEngineeringGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques
Step flow growth of β-Ga2O3 films on off-axis 4H-SiC substrates by LPCVD | Litcius