RA-ECDM of Silicon Wafers Using Taguchi’s Methodology and Machine Learning Algorithms
Manpreet Singh, Parvesh Antil, Sarbjit Singh, Nitish Katal, Dapinder Kaur Bakshi, Alkesh
Topics & Concepts
Taguchi methodsOrthogonal arrayMean squared errorMachiningMaterials scienceParametric statisticsElectrical discharge machiningAlgorithmExponential functionMechanical engineeringGaussianWaferRoot mean squareStatisticsMathematicsEngineeringComposite materialMathematical analysisMetallurgyNanotechnologyPhysicsQuantum mechanicsElectrical engineeringAdvanced Machining and Optimization TechniquesAdvanced machining processes and optimizationIntegrated Circuits and Semiconductor Failure Analysis