2.6 kV NiO/Ga<sub>2</sub>O<sub>3</sub> Heterojunction Diode with Superior High-Temperature Voltage Blocking Capability
Weibing Hao, Qiming He, Xuanze Zhou, Xiaolong Zhao, Guangwei Xu, Shibing Long
Abstract
In this study, we demonstrate an effective edge termination for vertical NiO/β-Ga <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> O <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> heterojunction diodes using a continuous p-NiO film as Junction Termination Extension (JTE). The JTE can spread out the edge electric field and reduce the peak electric field of the devices. The annealing process was optimized to suppress leakage current and increase I <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">on</inf> /I <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">off</inf> ratio up to ~10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">10</sup> . The record high breakdown voltage of 2.66 kV in heterojunction diodes with uniform distribution of leakage current was achieved. Analysis of temperature-dependent reverse current revealed that the reverse leakage mechanism of the devices is dominated by Poole-Frenkel emission. The breakdown voltage of 1.77 kV at 250 °C shows remarkable high-temperature voltage blocking capability of the devices and validates the great potential of NiO/β-Ga <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> O <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> diodes for high-temperature and high-voltage power electronic applications.