Spray-coated electret materials with enhanced stability in a harsh environment for an MEMS energy harvesting device
Anxin Luo, Yixin Xu, Yulong Zhang, Mi Zhang, Xiaoqing Zhang, Yan Lü, Fei Wang
Abstract
Abstract The charge stability of electret materials can directly affect the performance of electret-based devices such as electrostatic energy harvesters. In this paper, a spray-coating method is developed to deposit an electret layer with enhanced charge stability. The long-term stability of a spray-coated electret is investigated for 500 days and shows more stable performance than a spin-coated layer. A second-order linear model that includes both the surface charge and space charge is proposed to analyze the charge decay process of electrets in harsh environments at a high temperature (120 °C) and high humidity (99% RH); this model provides better accuracy than the traditional deep-trap model. To further verify the stability of the spray-coated electret, an electrostatic energy harvester is designed and fabricated with MEMS (micro-electromechanical systems) technology. The electret material can work as both the bonding interface and electret layer during fabrication. A maximum output power of 11.72 μW is harvested from a vibrating source at an acceleration of 28.5 m/s 2 . When the energy harvester with the spray-coated electret is exposed to a harsh environment (100 °C and 98% RH), an adequate amount of power can still be harvested even after 34 h and 48 h, respectively.