Engineering Stress in Thin Films: An Innovative Pathway Toward 3D Micro and Nanosystems
Thanh‐An Truong, Tuan‐Khoa Nguyen, Hangbo Zhao, Nhat‐Khuong Nguyen, Toan Dinh, Yoonseok Park, Thanh Nguyen, Yusuke Yamauchi, Nam‐Trung Nguyen, Hoang‐Phuong Phan
Abstract
Transformation of conventional 2D platforms into unusual 3D configurations provides exciting opportunities for sensors, electronics, optical devices, and biological systems. Engineering material properties or controlling and modulating stresses in thin films to pop-up 3D structures out of standard planar surfaces has been a highly active research topic over the last decade. Implementation of 3D micro and nanoarchitectures enables unprecedented functionalities including multiplexed, monolithic mechanical sensors, vertical integration of electronics components, and recording of neuron activities in 3D organoids. This paper provides an overview on stress engineering approaches to developing 3D functional microsystems. The paper systematically presents the origin of stresses generated in thin films and methods to transform a 2D design into an out-of-plane configuration. Different types of 3D micro and nanostructures, along with their applications in several areas are discussed. The paper concludes with current technical challenges and potential approaches and applications of this fast-growing research direction.