Litcius/Paper detail

Study on incompatible mechanism in chemical mechanical polishing of the novel graphite/diamond composite

Junyun Chen, Zihao Lin, Tianye Jin, Bing Liu, Anmin Nie

2023Applied Surface Science14 citationsDOI

Topics & Concepts

GraphiteDiamondX-ray photoelectron spectroscopyMaterials scienceComposite numberChemical-mechanical planarizationChemical engineeringPolishingAbrasiveCarbon fibersSurface roughnessComposite materialNanotechnologyEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchForce Microscopy Techniques and Applications