Study on incompatible mechanism in chemical mechanical polishing of the novel graphite/diamond composite
Junyun Chen, Zihao Lin, Tianye Jin, Bing Liu, Anmin Nie
Topics & Concepts
GraphiteDiamondX-ray photoelectron spectroscopyMaterials scienceComposite numberChemical-mechanical planarizationChemical engineeringPolishingAbrasiveCarbon fibersSurface roughnessComposite materialNanotechnologyEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchForce Microscopy Techniques and Applications