ReaxFF molecular dynamics simulation and experimental validation about chemical reactions of water and alcohols on SiC surface
Haibo Chen, Jiapeng Chen, Jiexiong Wu, Juanfen Shen, Yunyun Gu, Tao Sun, Tao Sun
Topics & Concepts
ReaxFFSilicon carbideMaterials scienceMolecular dynamicsSolventChemical engineeringAqueous solutionChemical reactionMoleculeAdsorptionChemical-mechanical planarizationSlurryPolishingPhysical chemistryOrganic chemistryComposite materialChemistryComputational chemistryHydrogen bondEngineeringAdvanced Surface Polishing TechniquesSemiconductor materials and devicesDiamond and Carbon-based Materials Research