Comparative study on GaAs/Si heterojunction fabricated by nitrogen and oxygen plasma activated bonding
Rui Huang, Qing Wang, Yecai Guo, Zhiyong Wang
Topics & Concepts
Plasma activationX-ray photoelectron spectroscopyHeterojunctionMaterials scienceTransmission electron microscopySurface roughnessAnalytical Chemistry (journal)Chemical engineeringOptoelectronicsNanotechnologyPlasmaChemistryComposite materialChromatographyEngineeringPhysicsQuantum mechanics3D IC and TSV technologiesIntegrated Circuits and Semiconductor Failure AnalysisElectronic Packaging and Soldering Technologies