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Air-Stable P-Doping in Record High-Performance Monolayer WSe<sub>2</sub> Devices

Chin‐Cheng Chiang, Hao-Yu Lan, Chin‐Sheng Pang, Joerg Appenzeller, Zhihong Chen

2021IEEE Electron Device Letters78 citationsDOI

Abstract

We demonstrate that a pure nitric oxide treatment at elevated temperatures provides a stable p-doping for monolayer WSe2. This approach allows achieving record high hole current densities of ~300 μA/μm and low contact resistances of ~950 Ω∙μm, while preserving the transistor on/off current ratio >2×106. This scalable pathway significantly improves the performance of p-type WSe2 transistors, opening new opportunities for advancing 2D integration.

Topics & Concepts

MonolayerDopingTransistorMaterials scienceOptoelectronicsScalabilityCurrent (fluid)OxideNanotechnologyAnalytical Chemistry (journal)Electrical engineeringComputer scienceChemistryEngineeringVoltageMetallurgyDatabaseChromatography2D Materials and ApplicationsMXene and MAX Phase MaterialsGraphene research and applications
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