Amorphous Carbon Coatings with Different Metal and Nonmetal Dopants: Influence of Cathode Modification on Laser-Arc Evaporation and Film Deposition
Tim Krülle, Frank Kaulfuß, Volker Weihnacht, Falko Hofmann, Florian Kirsten
Abstract
In this study, the arc evaporation of pure graphite and composite cathodes with small amounts of metals (Mo, Fe) or nonmetals (B, Si) was investigated by means of a laser-arc process. Both specific aspects of the arc evaporation and the effects on the deposition of the doped and undoped carbon coatings were studied. The deposition rate, the chemical composition and the mechanical properties of the generated films were evaluated. In addition, the dependence of the deposition rate and the composition on the height position of the substrates in relation to the cathode were also the subject of the investigations. Finally, the erosion rate and the arc spot behavior on the cathode were analyzed. It is shown that homogeneously doped (t)a-C:X coatings can be reliably synthesized with the laser-arc technique. There are differences in the various properties of the coatings and the deposition rate. The latter is attributed in particular to the erosion behavior of the cathodes.