Comparative assessment and experimental analysis of atomic coordination and mechanical properties of sputter deposited Ti-rich TiN, TiC, and TiCN thin films
Sanketa Jena, Aishwarya Madhuri, Mukul Gupta, Bibhu P. Swain
Topics & Concepts
TinMaterials scienceTitanium nitrideTitaniumSputteringMetallurgyNitrideSputter depositionTitanium carbideThin filmAnalytical Chemistry (journal)Composite materialNanotechnologyChemistryLayer (electronics)ChromatographyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research