Litcius/Paper detail

Geometrical Variability Impact on the Performance of Sub - 3 nm Gate-All-Around Stacked Nanosheet FET

Nisha Yadav, Sunil Jadav, Gaurav Saini

2022Silicon15 citationsDOI

Topics & Concepts

NanosheetMaterials scienceTransconductanceOptoelectronicsCapacitanceOxideGate oxideTransistorField-effect transistorNanotechnologyElectrical engineeringVoltageEngineeringPhysicsElectrodeMetallurgyQuantum mechanicsAdvancements in Semiconductor Devices and Circuit DesignSemiconductor materials and devicesNanowire Synthesis and Applications