Controllable electrochemical-magnetorheological finishing of single-crystal gallium nitride wafers
Jiewen Yan, Jisheng Pan, Qiusheng Yan, Rui Zhou, Yusen Wu
Topics & Concepts
Materials sciencePolishingWaferEtching (microfabrication)ElectrolyteMagnetorheological fluidElectrochemistryChemical-mechanical planarizationComposite materialIsotropic etchingSurface roughnessGallium nitrideOptoelectronicsLayer (electronics)ElectrodeChemistryStructural engineeringPhysical chemistryDamperEngineeringAdvanced Surface Polishing TechniquesAdvanced Machining and Optimization TechniquesDiamond and Carbon-based Materials Research