Ultra-low dielectric properties of porous polyimide thin films fabricated by using the two kinds of templates with different particle sizes
Yumi Kourakata, Tsunenobu Onodera, Hitoshi Kasai, Hiroshi Jinnai, Hidetoshi Oikawa
Topics & Concepts
PolyimidePorosityMaterials scienceDielectricTemplateParticle (ecology)Thin filmComposite materialParticle sizeChemical engineeringLayer (electronics)NanotechnologyOptoelectronicsOceanographyGeologyEngineeringSynthesis and properties of polymersSilicone and Siloxane ChemistryMesoporous Materials and Catalysis