A novel hypergraph convolution network-based approach for predicting the material removal rate in chemical mechanical planarization
Liqiao Xia, Pai Zheng, Xiao Huang, Chao Liu
Topics & Concepts
Chemical-mechanical planarizationHypergraphConvolution (computer science)Process (computing)Enhanced Data Rates for GSM EvolutionRepresentation (politics)Computer scienceDependency (UML)Theoretical computer scienceData miningArtificial intelligenceAlgorithmEngineeringArtificial neural networkMathematicsMechanical engineeringPolishingLawOperating systemDiscrete mathematicsPoliticsPolitical scienceAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationManufacturing Process and Optimization