Litcius/Paper detail

Mechanical strength problem of thin silicon wafers (120 and 140 <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si1.svg"> <mml:mrow> <mml:mi mathvariant="normal">μ</mml:mi> <mml:mi mathvariant="normal">m</mml:mi> </mml:mrow> </mml:math> ) cut with thinner diamond wires (Si kerf 120 → 100 <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si1.svg"> <mml:mrow> <mml:mi mathvariant="normal">μ</mml:mi> <mml:mi mathvariant="normal">m</mml:mi> </mml:mrow> </mml:math> ) for photovoltaic use

Halubai Sekhar, Tetsuo Fukuda, Katsuto Tanahashi, Hidetaka Takato, Hiromichi Ono, Yoshiyuki Sampei, Tsubasa Kobayashi

2020Materials Science in Semiconductor Processing42 citationsDOI

Topics & Concepts

WaferMaterials scienceComposite materialScanning electron microscopePerpendicularFracture (geology)SiliconCompressive strengthMetallurgyOptoelectronicsGeometryMathematicsSilicon and Solar Cell TechnologiesNanowire Synthesis and ApplicationsIntegrated Circuits and Semiconductor Failure Analysis