Two-step femtosecond laser etching for bulk micromachining of 4H–SiC membrane applied in pressure sensing
Lukang Wang, You Zhao, You Zhao, Yang Yu, Yulong Zhao, Yulong Zhao
Topics & Concepts
Materials scienceEtching (microfabrication)LaserFluenceSurface micromachiningFemtosecondReactive-ion etchingSurface roughnessSurface finishOpticsIsotropic etchingOptoelectronicsFabricationComposite materialLayer (electronics)Alternative medicineMedicinePhysicsPathologyAdvanced Surface Polishing TechniquesLaser Material Processing TechniquesDiamond and Carbon-based Materials Research