A generative-adversarial-network-based temporal raw trace data augmentation framework for fault detection in semiconductor manufacturing
Shu‐Kai S. Fan, Wei‐Yu Chen
Topics & Concepts
Computer scienceTRACE (psycholinguistics)Adversarial systemRaw dataGenerative grammarGenerative adversarial networkArtificial intelligenceFault (geology)Deep learningMachine learningData miningProgramming languageLinguisticsGeologySeismologyPhilosophyIndustrial Vision Systems and Defect DetectionAdvanced Statistical Process MonitoringManufacturing Process and Optimization