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A generative-adversarial-network-based temporal raw trace data augmentation framework for fault detection in semiconductor manufacturing

Shu‐Kai S. Fan, Wei‐Yu Chen

2024Engineering Applications of Artificial Intelligence15 citationsDOI

Topics & Concepts

Computer scienceTRACE (psycholinguistics)Adversarial systemRaw dataGenerative grammarGenerative adversarial networkArtificial intelligenceFault (geology)Deep learningMachine learningData miningProgramming languageLinguisticsGeologySeismologyPhilosophyIndustrial Vision Systems and Defect DetectionAdvanced Statistical Process MonitoringManufacturing Process and Optimization
A generative-adversarial-network-based temporal raw trace data augmentation framework for fault detection in semiconductor manufacturing | Litcius