Investigation on morphology and chemistry of the Beilby layer on polished fused silica
Zehua Wu, Gang Li, Yong Jia, Qipeng Lv, Songwen Deng, Yuqi Jin
Topics & Concepts
PolishingLayer (electronics)AdsorptionMaterials scienceChemical-mechanical planarizationChemisorptionChemical engineeringValence (chemistry)Morphology (biology)Surface layerNanotechnologyComposite materialChemistryOrganic chemistryBiologyGeneticsEngineeringDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesElectronic and Structural Properties of Oxides