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Effect of novel green inhibitor on corrosion and chemical mechanical polishing properties of cobalt in alkaline slurry

Haoran Li, Baoguo Zhang, Ye Li, Pengfei Wu, Ye Wang, Mengchen Xie

2022Materials Science in Semiconductor Processing20 citationsDOI

Topics & Concepts

CorrosionMaterials sciencePassivationPhytic acidScanning electron microscopeChemical-mechanical planarizationCorrosion inhibitorCobaltX-ray photoelectron spectroscopyNuclear chemistryMetallurgyElectrochemistrySlurryChemical engineeringPolishingInorganic chemistryLayer (electronics)ChemistryComposite materialElectrodeEngineeringPhysical chemistryBiochemistryAdvanced Surface Polishing TechniquesAdvanced materials and compositesAdvanced Machining and Optimization Techniques
Effect of novel green inhibitor on corrosion and chemical mechanical polishing properties of cobalt in alkaline slurry | Litcius