Effect of novel green inhibitor on corrosion and chemical mechanical polishing properties of cobalt in alkaline slurry
Haoran Li, Baoguo Zhang, Ye Li, Pengfei Wu, Ye Wang, Mengchen Xie
Topics & Concepts
CorrosionMaterials sciencePassivationPhytic acidScanning electron microscopeChemical-mechanical planarizationCorrosion inhibitorCobaltX-ray photoelectron spectroscopyNuclear chemistryMetallurgyElectrochemistrySlurryChemical engineeringPolishingInorganic chemistryLayer (electronics)ChemistryComposite materialElectrodeEngineeringPhysical chemistryBiochemistryAdvanced Surface Polishing TechniquesAdvanced materials and compositesAdvanced Machining and Optimization Techniques