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Highly transparent IGZO-TFTs uses IGZO source and drain electrodes with a composite insulation layer structure

Lei Zhang, Jiabang Wei, Kangjian Zhou, Chen Wan, Hang Sun

2020Optik29 citationsDOI

Topics & Concepts

Materials scienceTransmittanceOptoelectronicsThin-film transistorElectrodeLayer (electronics)SputteringActive layerSputter depositionComposite numberThin filmComposite materialNanotechnologyPhysical chemistryChemistryThin-Film Transistor TechnologiesTransition Metal Oxide NanomaterialsZnO doping and properties
Highly transparent IGZO-TFTs uses IGZO source and drain electrodes with a composite insulation layer structure | Litcius