Polishing mechanisms of various surfactants in chemical mechanical polishing relevant to cobalt interconnects
Lifei Zhang, Shuhui Wang, Tongqing Wang, Xinchun Lu
Topics & Concepts
Chemical-mechanical planarizationPolishingMaterials scienceWaferZeta potentialInterconnectionAbrasiveSlurryParticle (ecology)NanotechnologyComposite materialChemical engineeringNanoparticleComputer scienceOceanographyGeologyComputer networkEngineeringAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure AnalysisAdvanced materials and composites