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Development of an on-machine measurement system with chromatic confocal probe for measuring the profile error of off-axis biconical free-form optics in ultra-precision grinding

Sheng Wang, Qingliang Zhao

2022Measurement47 citationsDOI

Topics & Concepts

MachiningGrindingOpticsCompensation (psychology)Machine toolCoordinate-measuring machineSystem of measurementChromatic aberrationMechanical engineeringComputer scienceCalibrationMaterials scienceAcousticsChromatic scaleEngineeringPhysicsPsychologyQuantum mechanicsPsychoanalysisAstronomyAdvanced Surface Polishing TechniquesAdvanced Measurement and Metrology TechniquesOptical Coherence Tomography Applications
Development of an on-machine measurement system with chromatic confocal probe for measuring the profile error of off-axis biconical free-form optics in ultra-precision grinding | Litcius