Chemical-mechanical synergies effects of multi-purpose pH regulators on C-, A-, and R-plane sapphire polishing
Yida Zou, Xinhuan Niu, Ni Zhan, Jianghao Liu, Xinjie Li, Chao He, Changxin Dong, Yunhui Shi
Topics & Concepts
PolishingSapphireChemical-mechanical planarizationPlane (geometry)Materials scienceOptoelectronicsNanotechnologyMechanical engineeringComposite materialEngineeringOpticsPhysicsMathematicsGeometryLaserCorrosion Behavior and InhibitionIon-surface interactions and analysisAdvanced Surface Polishing Techniques