Laser-excited surface acoustic wave method for detecting subsurface damage of processed silicon nitride ceramics
Haiyuan Jia, Bin Lin, Zaiwei Liu, Xiaokang Ma, Yangfan Wan, Wenxing Chen, Yong Li
Topics & Concepts
Materials scienceSilicon nitrideUltrasonic sensorCeramicSurface roughnessSilicon carbideComposite materialSurface waveLaserDelamination (geology)AcousticsOpticsLayer (electronics)GeologyPaleontologySubductionPhysicsTectonicsAdvanced Surface Polishing TechniquesUltrasonics and Acoustic Wave PropagationLaser Material Processing Techniques