Micro-scratches generation mechanism by copper oxides adhered on silica abrasive in copper chemical mechanical polishing
Yushan Chen, Liang Jiang, Linmao Qian
Topics & Concepts
Chemical-mechanical planarizationCopperAbrasiveMaterials sciencePolishingOxideSlurryNanoparticleMetallurgyCopper oxideComposite materialNanotechnologyAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationIntegrated Circuits and Semiconductor Failure Analysis