AI-powered semiconductor wafer fabrication: A manufacturing paradigm shift
Guanwei He, Qingqing Huang, Xin‐Hao Li, Libo ZHOU, Miao Yang, Yadan Luo, Marian Wiercigroch, Han Huang, Han Huang
Topics & Concepts
Semiconductor device fabricationWafer fabricationProcess (computing)Computer scienceEngineeringQuality (philosophy)Key (lock)Manufacturing engineeringWaferParadigm shiftSystems engineeringArtificial intelligenceAdvanced manufacturingElectronicsPosition paperEmerging technologiesBlueprintRoboticsReliability (semiconductor)Work in processIndustrial Vision Systems and Defect DetectionMachine Learning in Materials ScienceAdvanced Surface Polishing Techniques