Mechanical properties of amorphous and crystalline CrN/CrAlSiN multilayer coating fabricated using HPPMS
Chi-Lung Chang, Chun-Hong Huang, Ching-Yen Lin, Fu-Chi Yang, Jian-Fu Tang
Topics & Concepts
Materials scienceCrystallinityAmorphous solidComposite materialSputter depositionCoatingArgonWaferSputteringMetallurgyThin filmCrystallographyNanotechnologyAtomic physicsChemistryPhysicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchIon-surface interactions and analysis