Microstructure and tribological performance of (AlCrWTiMo)N film controlled by substrate temperature
Yongxin Wang, Nankai He, Chunting Wang, Jinlong Li, Wuming Guo, Yongfeng Sui, Jibing Lan
Topics & Concepts
Materials scienceNanocrystalline materialMicrostructureAmorphous solidTribologySubstrate (aquarium)Grain sizeComposite materialSputter depositionSurface roughnessAbrasiveElastic modulusThin filmSputteringNanotechnologyCrystallographyChemistryOceanographyGeologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research