Oxygen-Vacancy-Rich SnO<sub>2</sub> Nanoparticles Based Ultralow-Power MEMS Sensor for Nitrogen Dioxide Detection
Yong Yan, Xigui Lan, Yuzhou Li, Meihua Liang, Xiaodong Liu, Jiaxuan Yang, Rongrong Jia, Yuanyuan Ge, Zhili Li, Lei Huang
Abstract
The development of highly sensitive and ultralow-power NO 2 sensors is crucial for real-time NO 2 monitoring. This study synthesizes tiny SnO 2 nanoparticles with enriched oxygen vacancies for use in microelectromechanical system (MEMS) gas sensors, enabling ppb-level NO 2 detection at reduced operating temperatures. PVP was used to adjust the particle size and surface oxygen vacancies in the hydrothermal method. The gas sensing performance shows that the 0.75 g PVP-SnO 2 exhibited the highest response of 14.7 to 500 ppb NO 2 at a low operating temperature of 102 °C, which is 3.2 times higher than that of the 0.00 g PVP-SnO 2 sensor under the same conditions. Compared to similar studies, this sensor achieved a high response value and ultralow power consumption of 8.4 mW. The improvement in performance is mainly attributed to N doping and the abundance of oxygen vacancies. This research presents a promising strategy for the development of high-performance, low-energy, real-time NO 2 gas sensors.