Advanced lithography materials: From fundamentals to applications
Yanhui Zhang, Haojie Yu, Li Wang, Xudong Wu, Jiawen He, Wenbing Huang, Chengaung Ouyang, Dingning Chen, Basem E. Keshta
Topics & Concepts
NanotechnologyLithographyNanolithographyPhotoresistResistMaterials sciencePhotolithographyExtreme ultraviolet lithographyFabricationNext-generation lithographyOptoelectronicsLayer (electronics)Electron-beam lithographyAlternative medicinePathologyMedicineAdvancements in Photolithography TechniquesNanofabrication and Lithography TechniquesAdvanced Surface Polishing Techniques