Multifunctional MEMS, NEMS, micro/nano-structures enabled by piezoelectric and ferroelectric effects
Mengyao Xiao, Ao Xu, Zhouli Sui, Wenjie Zhang, Huajun Liu, Chengkuo Lee
Abstract
. These materials support devices including mechanical sensors, RF resonators for gas detection, energy harvesters, non-volatile memories such as FeRAM and FeFETs, and neuromorphic computing arrays, as well as microspeakers and microphones for compact audio interfaces. They also play a key role in reconfigurable photonic components through acousto-optic and electro-optic modulation. This review examines materials, device designs, and integration strategies shaping next-generation intelligent microsystems across domains such as Artificial Intelligence of Things (AIoT), wearables, and robotics.
Topics & Concepts
Neuromorphic engineeringNanoelectromechanical systemsMicroelectromechanical systemsMicrosystemMaterials sciencePiezoelectricityFerroelectric RAMWearable computerResonatorNanotechnologyPhotonicsFerroelectricityNano-OptoelectronicsComputer scienceEmbedded systemArtificial intelligenceArtificial neural networkDielectricNanomedicineComposite materialNanoparticleAcoustic Wave Resonator TechnologiesFerroelectric and Piezoelectric MaterialsGas Sensing Nanomaterials and Sensors