Fabrication and function examination of PZT-based MEMS accelerometers
Yi‐Chia Lee, Cheng‐Che Tsai, Cheng-Ying Li, Yu-Cheng Liou, Cheng-Shong Hong, Sheng‐Yuan Chu
Topics & Concepts
Microelectromechanical systemsMaterials scienceAccelerometerFabricationFunction (biology)OptoelectronicsComputer scienceMedicineOperating systemBiologyAlternative medicineEvolutionary biologyPathologyFerroelectric and Piezoelectric MaterialsAcoustic Wave Resonator TechnologiesAdvanced Sensor and Energy Harvesting Materials