Design and development of medium-pressure plasma process for optical substrate finishing: A comparative study with wet chemical etching
Hari Narayan Singh Yadav, Manas Das
Topics & Concepts
Materials sciencePolishingSurface roughnessIsotropic etchingEtching (microfabrication)Surface finishSubstrate (aquarium)Reactive-ion etchingComposite materialAtmospheric-pressure plasmaScanning electron microscopeSiliconHydrofluoric acidMicrostructurePlasmaAnalytical Chemistry (journal)MetallurgyLayer (electronics)ChemistryGeologyQuantum mechanicsOceanographyChromatographyPhysicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchPlasma Diagnostics and Applications