Precise stepping control of a piezoelectric traveling wave micromotor through embedded <i>in-situ</i> detection
Yicheng Wang, Tianyu Yang, Xiaoshi Li, Jie Cheng, Yu Chen, Dongdong Gong, Xiangyu Sun, Yijia Du
Abstract
Abstract Piezoelectric actuators are well known for their high precision, and are promising for applications in microrobotics, drug delivery and nanopositioning. However, a piezoelectric traveling wave ultrasonic micromotor is very hard to control due to the frictional drive principle. This work introduces a closed-loop control strategy for a micromotor. An integrating on-chip structure with a piezoelectric stator and sensor alignment is firstly achieved within a 5 × 5 mm 2 area, which provides in-situ detection during rotation. With the help of real-time detection and control, a high angular resolution of 0.3° is realized for the micromotor.
Topics & Concepts
Traveling waveIn situAcousticsPiezoelectricityComputer scienceMaterials sciencePhysicsEngineeringMathematicsMathematical analysisMeteorologyPiezoelectric Actuators and ControlAdvanced MEMS and NEMS TechnologiesMechanical and Optical Resonators