An absolute surface encoder with a planar scale grating of variable periods
Yuki Shimizu, Ryo Ishizuka, K. Mano, Yuri Kanda, Hiraku Matsukuma, Wei Gao
Topics & Concepts
OpticsGratingBlazed gratingUltrasonic gratingDiffractionPlanarPhysicsDiffraction gratingDetectorFemtosecondHolographic gratingMaterials scienceLaserComputer scienceComputer graphics (images)Advanced Measurement and Metrology TechniquesAdvanced Fiber Laser TechnologiesOptical measurement and interference techniques