The structure and properties of high-entropy (MoTaNbZrHf)-Si-B coatings deposited by DCMS and HIPIMS methods using the multilayer target
Ph. V. Kiryukhantsev–Korneev, A.D. Chertova, Ф. И. Чударин, E. I. Pаtsera, Е. А. Левашов
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceCrystalliteSputter depositionComposite materialHigh entropy alloysCavity magnetronBorosilicate glassPhysical vapor depositionWear resistanceSputteringMetallurgyThin filmNanotechnologyMicrostructureCoatingHigh Entropy Alloys StudiesAdvanced materials and compositesMetal and Thin Film Mechanics