A 2-DOF piezoelectric platform for cross-scale semiconductor inspection
Lusheng Yuan, Liang Wang, Rui Qi, Yan Li, Chuangye Liu, Gang Luo
Topics & Concepts
PiezoelectricitySemiconductorScale (ratio)AcousticsMaterials scienceStructural engineeringEngineeringPhysicsOptoelectronicsQuantum mechanicsPiezoelectric Actuators and ControlAdvanced Surface Polishing TechniquesForce Microscopy Techniques and Applications