Six million Q factor micro fused silica shell resonator with teeth-like tines released by femtosecond laser-assisted chemical etching
Tao Zhao, Yan Shi, Kun Lu, Xiang Xi, XueZhong Wu, Dingbang Xiao
Topics & Concepts
FemtosecondMaterials scienceResonatorIsotropic etchingLaserEtching (microfabrication)OpticsQ factorSurface roughnessSurface finishDeep reactive-ion etchingMicroelectromechanical systemsOptoelectronicsComposite materialReactive-ion etchingLayer (electronics)PhysicsLaser Material Processing TechniquesPhotonic and Optical DevicesAdvanced Fiber Laser Technologies