High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving
Yunfei Yin, Zhaowu Liu, Shan Jiang, Wei Wang, Hongzhu Yu, Jiri Galantu, Qun Hao, Wenhao Li
Topics & Concepts
OpticsHeterodyne (poetry)GratingInterferometryOptical pathAccuracy and precisionInterference (communication)Astronomical interferometerDisplacement (psychology)Optical path lengthMaterials sciencePhysicsComputer scienceTelecommunicationsAcousticsPsychotherapistChannel (broadcasting)PsychologyQuantum mechanicsAdvanced Measurement and Metrology TechniquesOptical measurement and interference techniquesAdvanced Fiber Optic Sensors