Simulation and experimental verification study on the process parameters of ZnO-MOCVD
Jie Wang, Yi-cong He, Tiecheng Luo, Ya Li, Zheng Zhou, Bingfeng Fan, Jian Li, Gang Wang
Topics & Concepts
Materials scienceMetalorganic vapour phase epitaxyChemical vapor depositionRepeatabilityReliability (semiconductor)Deposition (geology)Substrate (aquarium)Volumetric flow rateMass fractionComputational fluid dynamicsFlow (mathematics)Composite materialMechanicsNanotechnologyThermodynamicsLayer (electronics)BiologyGeologyOceanographyPower (physics)SedimentChemistryEpitaxyPhysicsPaleontologyChromatographyZnO doping and propertiesThin-Film Transistor TechnologiesAdvanced Sensor Technologies Research