Liquid and solid states on-chip micro-supercapacitors using silicon nanowire-graphene nanowall-pani electrode based on microfabrication technology
Nguyễn Văn Toàn, Trương Thị Kim Tươi, Jinhua Li, Naoki Inomata, Takahito Ono
Topics & Concepts
Materials scienceSupercapacitorNanowireNanotechnologyGraphenePlasma-enhanced chemical vapor depositionSiliconEtching (microfabrication)ElectrodeChemical vapor depositionOptoelectronicsCapacitanceLayer (electronics)Physical chemistryChemistrySupercapacitor Materials and FabricationAdvanced Sensor and Energy Harvesting MaterialsConducting polymers and applications