Implementation of In–Ga–Zn–O Thin-Film Transistors with Vertical Channel Structures Designed with Atomic-Layer Deposition and Silicon Spacer Steps
Se-Na Choi, Sung‐Min Yoon
Topics & Concepts
Materials scienceAtomic layer depositionEtching (microfabrication)SiliconOptoelectronicsLayer (electronics)Deposition (geology)Nanoscopic scaleTransistorNanotechnologyThin-film transistorVoltageElectrical engineeringEngineeringPaleontologyBiologySedimentThin-Film Transistor TechnologiesZnO doping and propertiesSemiconductor materials and devices