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Exploring the effectiveness of polyhydroxy complexing agents in sapphire chemical mechanical polishing: Combining experiments and theoretical calculation

Xinjie Li, Yida Zou, Xinhuan Niu, Yingqian Jia, Ni Zhan, Jianghao Liu, Chao He, Changxin Dong, Yunhui Shi

2024Tribology International13 citationsDOI

Topics & Concepts

PolishingSapphireChemical-mechanical planarizationMaterials scienceChemical engineeringNanotechnologyMechanical engineeringComposite materialEngineeringOpticsPhysicsLaserAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationDrilling and Well Engineering
Exploring the effectiveness of polyhydroxy complexing agents in sapphire chemical mechanical polishing: Combining experiments and theoretical calculation | Litcius