Exploring the effectiveness of polyhydroxy complexing agents in sapphire chemical mechanical polishing: Combining experiments and theoretical calculation
Xinjie Li, Yida Zou, Xinhuan Niu, Yingqian Jia, Ni Zhan, Jianghao Liu, Chao He, Changxin Dong, Yunhui Shi
Topics & Concepts
PolishingSapphireChemical-mechanical planarizationMaterials scienceChemical engineeringNanotechnologyMechanical engineeringComposite materialEngineeringOpticsPhysicsLaserAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationDrilling and Well Engineering